
| MTF | Edge or Line Pattern |
| DOF | Depth of Focus |
| FBFL | Flange Back Focal Length |
| EFL | |
| Through Focus | |
| Focus Tilt | Curvature Height |
| Image Plane | Tilt Angle & Azimuth |
| Image plane Correction | |
| S.F.R. | Spatial Frequency Response |
| Limit Resolution | |
| C.R.A. | Chief Ray Angle |
| Encircle Energy | Edge Pattern |
| Machine Dimensions | 190cm *76cm *160cm |
| Machine Weight | 350 Kg |
| Power Supply | AC220V/10A |
| IPC Operation system | Microsoft Windows 10 |
| Reticle Pattern – 3 types (Optional) |
A:Edge (ISO 12233) + Grid B:Cross Line + Grid C:Cross Line |
| MTF Repeatability (10pcs sample、tray in/out 5 times、excluding load & unload) |
Delta MTF : (<= 200lp/mm) On axis <= 1.5 ; off axis <= 2.5 |
| Average test times/pc H/W trigger Mode (without tray load and unload) |
2.0s /pc (M6 Lens、through focus range +/-0.04) |
| MTF Repeatability (without tray load/unload) |
Delta MTF : (<= 180lp/mm) On axis <= 1.5 ; off axis <= 2.5 |
| Maximum Measuring Frequency | 300lp/mm |
| Limited FBL | > -3.0mm |
| BFL Repeatability | ≦0.02 mm |
| Limited Image Circle | ≦12mm ( >12mm customized) |
| System Spectrum Response | Photopic or NIR |
| Light Source | White Light or NIR LED Light Source |