UMA / 產品介紹 / 鏡頭MTF檢測設備
DSC-E3WG

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DSC-E3WG Wafer Series
鏡頭檢測儀 Waveguide Image Quality Tester
以光波導光學元件之MTF檢測為應用之產品。
具有速度快、精度高、重現佳、價格合理等特點，並可與業界標準合致。

應用產品
Wafer適用多組料盤式與 8吋晶圓樣品。

特點
✔ 單一機台可支援穿透及反射模式波導。
✔ 支援 8” wafer或料盤作量產測試
✔ 可支援 R、G、B 三個分別獨立 Channel MTF 測試，波長可指定客製。
 

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測試功能

MTF 9~17 angular tested by color cameras
Test Channel R、G、B channel
Test Mode Reflection and Transmission mode
Test Positions Within Eye-box Range Changeable
Eye-box Pupil Manual replaceable
Position Centering Position confirmation via vision system (Optional)

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系統規格

Machine Dimensions 900W*1050D*1500H mm
Machine Weight 350 Kg
Power Supply AC220V/10A
Communication Interface I/O Card
Operation System Windows 10 64bit



 

設備規格

Detector System 9~17 color cameras with telescope lens
Eye-Box Pupil Size 1mm ~ 6mm (Manual replaceable)
Eye Relief +/-5mm (Manual adjustment)
MTF Repeatability Delta MTF (Max-Min) ≤ 3.0
(Condition: 1. The light intensity at each Eyebox position, field and R/G/B channel has to be bright enough(>70/255)
2. The repeatability will be not counted if the brightness is insufficient, which is defined by the system auto-exposure result.)
Average Test Times < 3s/Eye-box position (Eye box position change excluded)
(Condition: The exposure time has to be short enough ( < 500ms )

Test Angular Range
(Multi-Camera)
 
 Delta (FOV/2) > 6°
Reflection mode(diagonal)   : +/- 30°
Transmission mode(diagonal) : +/- 35°
Max Special Frequency 60lp/deg